Please use this identifier to cite or link to this item: https://dspace.ctu.edu.vn/jspui/handle/123456789/63983
Title: Investigation of coupled effects of temperature and relative humidity on dynamic performance of mems beam resonators in gas rarefaction
Authors: Nguyen, Chi Cuong
Trinh, Xuan Thang
Truong, Van Phat
Vu, Manh Giap
Ngo, Vo Ke Thanh
Keywords: MEMS resonators
Quality factor
Relative humidity
Temperature
Gas rarefaction
Issue Date: 2019
Series/Report no.: Vietnam Journal of Science and Technology;Vol. 57, No. 03 .- P.366-380
Abstract: The modified molecular gas lubrication (MMGL) equation with the effective viscosity of moist air is utilized to solve for the squeeze film damping (SFD) problem on the dynamic performance of MEMS resonators. Thus, the coupled effects of temperature and relative humidity are discussed on the Q-factors of MEMS resonators in a wide range of gas rarefaction (pressure, p and accommodation coefficients, (Acs)) and resonant mode of vibration. The results showed that the Q-factor of moist air decreases more significantly as temperature and relative humidity increase at higher gas rarefaction (lower p, and ACs) conditions.
URI: https://dspace.ctu.edu.vn/jspui/handle/123456789/63983
ISSN: 2525-2518
Appears in Collections:Vietnam journal of science and technology

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